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E09900 - SEMI E99 - キャリアIDリーダ/ライタ機能スタンダード:コンセプト,挙動,およびサービスに関する仕様 StdTpc-undefined and 45 nm Technology Generations

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Description

and 45 nm Technology Generations

本測定技術は,ミニエンバイロメントに対するプロセスステップの影響をチェックするためにも使用できる。

including handling and packaging

Originally published September 1998

SEMI E5-1108 (technical revision)

E09900 - SEMI E99 - キャリアIDリーダ/ライタ機能スタンダード:コンセプト,挙動,およびサービスに関する仕様 StdTpc-undefined and 45 nm Technology GenerationsNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI IDIDIDID IDID IDID ID Subordinate Standards (included) SEMI E99 1104 (Reapproved 0710) IDSECS ISECS II Referenced SEMI Standards (purchase separately) SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300

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